Gas programming functionality

The Alicat MCE accurately controls gas flow rates as low as 0-0.5sccm full scale or as high as 0-20slpm full scale. With 20 to 50 millisecond control response times to setpoint changes, the MCE improves vacuum coating end products and helps eliminate target poisoning.

The all-in-one design of the XpressStick MFC gas stick eliminates complex hardware specification in processes which include a combination of specialty gases, pressure, precise regulation, and vacuum. Its easy programming and precise gas control system allows users to go from bottle to process in one simple step. Designed to meet ultra-high purity process requirements, the XpressStick is also offered in a stainless steel model for corrosive environments.

With the MCE’s zero warm up time, the XpressStick is ready to control process flows in just one second, with real time mass flow, volumetric flow, absolute pressure and temperature data, fully compensated for temperature and pressure. The gas module is programmed directly through the MCE’s integrated display, with easy changes to gas type using the on-board gas calibrations.

“Fast response time, accuracy, and reliability were all key criteria in choosing an MFC instrument for our XpressStick,” explained MDC vice president of Engineering & Technology, James Moore. “Based on past experience with Alicat, we knew that they could deliver all three, with an integrated display that enables our all-in-one design.”