Geometric performance

Applications range from high-accuracy surface profilometry to high-speed semiconductor and LED wafer scribing.

With an optimised structure, components with exacting precision, Aerotech’s own direct-drive motor technology and an integrated cable management system, the Planar_DL is claimed to have industry leading planar performance.

Planar_DL structural elements are optimised for high-dynamics and high-stiffness for the most demanding dynamic applications.

Capable of achieving 1m/s velocities and 1.5 g accelerations, the Planar_DL enables high-throughput, high-accuracy processing resulting in superior process yield and a low total cost of ownership.